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Comparison of Ni- and SiGe-based MEMS magnetometers

dc.contributor.authorRochus, V.
dc.contributor.authorJansen, R.
dc.contributor.authorRottenberg, X.
dc.contributor.authorTilmans, H.A.C.
dc.contributor.authorRanvier, S.
dc.contributor.authorLamy, H.
dc.contributor.authorRochus, P.
dc.date2012
dc.date.accessioned2016-03-29T10:07:38Z
dc.date.available2016-03-29T10:07:38Z
dc.identifier.isbn9781467315128
dc.identifier.urihttps://orfeo.belnet.be/handle/internal/3047
dc.descriptionThe goal of this research is to design and fabricate a very sensitive MEMS-based magnetic field sensor for space applications. The challenge is to reach the required sensitivity: measuring magnetic fields from a few nT to about 60000nT with sub-nano Tesla accuracy. The device studied in this paper is based on a classical resonating Xylophone Bar Magnetometer (XBM). It consists of a free-free beam supported in the nodal points of the fundamental transverse mode of vibration. A sinusoidal current at the vibration frequency is supplied via the nodal supports. In the presence of an external magnetic field, this current results in a sinusoidal Lorentz force that puts the XBM in vibration at its fundamental frequency. Two different materials are proposed to fabricate this device: the first one is Poly-SiGe and the second is Nickel. The paper will present multi-physics simulations to evaluate the response of the SiGe-XBM and the Ni-XBM. Following these studies, devices with several support lengths and shapes were designed and fabricated in poly-SiGe and Nickel. Increasing the quality factor by a dedicated design of the support and using the intrinsic properties of the material, the new magnetometer will have improved accuracy and resolution and will meet the requirements for space applications.
dc.languageeng
dc.titleComparison of Ni- and SiGe-based MEMS magnetometers
dc.typeConference
dc.subject.frascatiPhysical sciences
dc.audienceScientific
dc.subject.freeExternal magnetic field
dc.subject.freeFree-free beam
dc.subject.freeFundamental frequencies
dc.subject.freeIntrinsic property
dc.subject.freeMagnetic field sensors
dc.subject.freeMultiphysics simulations
dc.subject.freeNodal points
dc.subject.freePoly-SiGe
dc.subject.freeQuality factors
dc.subject.freeSinusoidal currents
dc.subject.freeSinusoidal Lorentz force
dc.subject.freeTransverse mode
dc.subject.freeVibration frequency
dc.subject.freeExperiments
dc.subject.freeMagnetic fields
dc.subject.freeMagnetometers
dc.subject.freeMicroelectronics
dc.subject.freeMicrosystems
dc.subject.freePolysilicon
dc.subject.freeSpace applications
dc.subject.freeSilicon alloys
dc.source.title2012 13th International Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2012
dc.source.page6191703
Orfeo.peerreviewedNo
dc.identifier.doi10.1109/ESimE.2012.6191703
dc.identifier.scopus2-s2.0-84861349623


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