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    Comparison of Ni- and SiGe-based MEMS magnetometers

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    Rochus(2012).pdf (1.755Mb)
    Authors
    Rochus, V.
    Jansen, R.
    Rottenberg, X.
    Tilmans, H.A.C.
    Ranvier, S.
    Lamy, H.
    Rochus, P.
    Show allShow less
    Discipline
    Physical sciences
    Subject
    External magnetic field
    Free-free beam
    Fundamental frequencies
    Intrinsic property
    Magnetic field sensors
    Multiphysics simulations
    Nodal points
    Poly-SiGe
    Quality factors
    Sinusoidal currents
    Sinusoidal Lorentz force
    Transverse mode
    Vibration frequency
    Experiments
    Magnetic fields
    Magnetometers
    Microelectronics
    Microsystems
    Polysilicon
    Space applications
    Silicon alloys
    Audience
    Scientific
    Date
    2012
    Metadata
    Show full item record
    Description
    The goal of this research is to design and fabricate a very sensitive MEMS-based magnetic field sensor for space applications. The challenge is to reach the required sensitivity: measuring magnetic fields from a few nT to about 60000nT with sub-nano Tesla accuracy. The device studied in this paper is based on a classical resonating Xylophone Bar Magnetometer (XBM). It consists of a free-free beam supported in the nodal points of the fundamental transverse mode of vibration. A sinusoidal current at the vibration frequency is supplied via the nodal supports. In the presence of an external magnetic field, this current results in a sinusoidal Lorentz force that puts the XBM in vibration at its fundamental frequency. Two different materials are proposed to fabricate this device: the first one is Poly-SiGe and the second is Nickel. The paper will present multi-physics simulations to evaluate the response of the SiGe-XBM and the Ni-XBM. Following these studies, devices with several support lengths and shapes were designed and fabricated in poly-SiGe and Nickel. Increasing the quality factor by a dedicated design of the support and using the intrinsic properties of the material, the new magnetometer will have improved accuracy and resolution and will meet the requirements for space applications.
    Citation
    Rochus, V.; Jansen, R.; Rottenberg, X.; Tilmans, H.A.C.; Ranvier, S.; Lamy, H.; Rochus, P. (2012). Comparison of Ni- and SiGe-based MEMS magnetometers. , 2012 13th International Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2012, 6191703, DOI: 10.1109/ESimE.2012.6191703.
    Identifiers
    isbn: 9781467315128
    uri: https://orfeo.belnet.be/handle/internal/3047
    doi: http://dx.doi.org/10.1109/ESimE.2012.6191703
    scopus: 2-s2.0-84861349623
    Type
    Conference
    Peer-Review
    No
    Language
    eng
    Links
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