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Embedding vertical nanosheets of metals into PDMS with a reusable template engineering

dc.contributor.authorJalabert, L.
dc.contributor.authorSato, T.
dc.contributor.authorKumemura, M.
dc.contributor.authorBolsee, D.
dc.contributor.authorHermans, C.
dc.contributor.authorBenMoussa, A.
dc.contributor.authorFujita, H.
dc.date2010
dc.date.accessioned2016-03-30T12:01:17Z
dc.date.available2016-03-30T12:01:17Z
dc.identifier.urihttps://orfeo.belnet.be/handle/internal/3176
dc.descriptionIn this work, we report on a novel microfabrication process suitable for macroelectronics, flexible electronics and biological applications. It consists of the embedding of high aspect ratio vertical nanosheets of materials on the surface of polydimethylsiloxane (PDMS) by using a reusable template and a dry-transfer process. Vertical Au-nanosheets (Au-NS) were successfully transferred onto the PDMS surface. Although a high density of embedded vertical nanosheets on the PDMS, the optical properties of the PDMS sheet in transmission were high enough for a low cost and high-resolution flexible photomask application. Sub-micron photolithography was demonstrated using inexpensive UV mask aligner and photoresist. ©2010 IEEE.
dc.languageeng
dc.titleEmbedding vertical nanosheets of metals into PDMS with a reusable template engineering
dc.typeConference
dc.subject.frascatiEngineering and technology
dc.audienceScientific
dc.subject.freeBiological applications
dc.subject.freeHigh aspect ratio
dc.subject.freeHigh density
dc.subject.freeHigh resolution
dc.subject.freeLow costs
dc.subject.freeMacroelectronics
dc.subject.freeMicrofabrication process
dc.subject.freePDMS surfaces
dc.subject.freePolydimethylsiloxane PDMS
dc.subject.freeReusable templates
dc.subject.freeSubmicron
dc.subject.freeTransfer process
dc.subject.freeUV masks
dc.subject.freeAspect ratio
dc.subject.freeComputer software reusability
dc.subject.freeFlexible electronics
dc.subject.freeLight transmission
dc.subject.freeMechanical engineering
dc.subject.freeMechanics
dc.subject.freeMicrochannels
dc.subject.freeNanosheets
dc.subject.freeOptical properties
dc.subject.freeReactive ion etching
dc.subject.freeSilicones
dc.source.titleProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
dc.source.page384-387
Orfeo.peerreviewedNo
dc.identifier.doi10.1109/MEMSYS.2010.5442484
dc.identifier.scopus2-s2.0-77952767291


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