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    Embedding vertical nanosheets of metals into PDMS with a reusable template engineering

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    Jalabert(2010).pdf (2.434Mb)
    Authors
    Jalabert, L.
    Sato, T.
    Kumemura, M.
    Bolsee, D.
    Hermans, C.
    BenMoussa, A.
    Fujita, H.
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    Discipline
    Engineering and technology
    Subject
    Biological applications
    High aspect ratio
    High density
    High resolution
    Low costs
    Macroelectronics
    Microfabrication process
    PDMS surfaces
    Polydimethylsiloxane PDMS
    Reusable templates
    Submicron
    Transfer process
    UV masks
    Aspect ratio
    Computer software reusability
    Flexible electronics
    Light transmission
    Mechanical engineering
    Mechanics
    Microchannels
    Nanosheets
    Optical properties
    Reactive ion etching
    Silicones
    Audience
    Scientific
    Date
    2010
    Metadata
    Show full item record
    Description
    In this work, we report on a novel microfabrication process suitable for macroelectronics, flexible electronics and biological applications. It consists of the embedding of high aspect ratio vertical nanosheets of materials on the surface of polydimethylsiloxane (PDMS) by using a reusable template and a dry-transfer process. Vertical Au-nanosheets (Au-NS) were successfully transferred onto the PDMS surface. Although a high density of embedded vertical nanosheets on the PDMS, the optical properties of the PDMS sheet in transmission were high enough for a low cost and high-resolution flexible photomask application. Sub-micron photolithography was demonstrated using inexpensive UV mask aligner and photoresist. ©2010 IEEE.
    Citation
    Jalabert, L.; Sato, T.; Kumemura, M.; Bolsee, D.; Hermans, C.; BenMoussa, A.; Fujita, H. (2010). Embedding vertical nanosheets of metals into PDMS with a reusable template engineering. , Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 384-387, DOI: 10.1109/MEMSYS.2010.5442484.
    Identifiers
    uri: https://orfeo.belnet.be/handle/internal/3176
    doi: http://dx.doi.org/10.1109/MEMSYS.2010.5442484
    scopus: 2-s2.0-77952767291
    Type
    Conference
    Peer-Review
    No
    Language
    eng
    Links
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