Embedding vertical nanosheets of metals into PDMS with a reusable template engineering
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Authors
Jalabert, L.
Sato, T.
Kumemura, M.
Bolsee, D.
Hermans, C.
BenMoussa, A.
Fujita, H.
Discipline
Engineering and technology
Subject
Biological applications
High aspect ratio
High density
High resolution
Low costs
Macroelectronics
Microfabrication process
PDMS surfaces
Polydimethylsiloxane PDMS
Reusable templates
Submicron
Transfer process
UV masks
Aspect ratio
Computer software reusability
Flexible electronics
Light transmission
Mechanical engineering
Mechanics
Microchannels
Nanosheets
Optical properties
Reactive ion etching
Silicones
Audience
Scientific
Date
2010Metadata
Show full item recordDescription
In this work, we report on a novel microfabrication process suitable for macroelectronics, flexible electronics and biological applications. It consists of the embedding of high aspect ratio vertical nanosheets of materials on the surface of polydimethylsiloxane (PDMS) by using a reusable template and a dry-transfer process. Vertical Au-nanosheets (Au-NS) were successfully transferred onto the PDMS surface. Although a high density of embedded vertical nanosheets on the PDMS, the optical properties of the PDMS sheet in transmission were high enough for a low cost and high-resolution flexible photomask application. Sub-micron photolithography was demonstrated using inexpensive UV mask aligner and photoresist. ©2010 IEEE.
Citation
Jalabert, L.; Sato, T.; Kumemura, M.; Bolsee, D.; Hermans, C.; BenMoussa, A.; Fujita, H. (2010). Embedding vertical nanosheets of metals into PDMS with a reusable template engineering. , Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 384-387, DOI: 10.1109/MEMSYS.2010.5442484.Identifiers
scopus: 2-s2.0-77952767291
Type
Conference
Peer-Review
No
Language
eng