Poly-SiGe-based MEMS xylophone bar magnetometer
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Authors
Rochus, V.
Jansen, R.
Tilmans, H.A.C.
Rottenberg, X.
Chen, C.
Ranvier, S.
Lamy, H.
Rochus, P.
Discipline
Physical sciences
Subject
High Q factor
In-vacuum
Integration and packaging
Lorentz force actuators
Magnetic field amplitudes
Magnetic field dependences
MEMS technology
Multi-physics
On-chip integration
Optical oscillations
Optical vibrometer
Poly-SiGe
Q-factors
Resonant sensors
S-Parameter measurements
Sensor designs
Small footprints
Wide temperature ranges
Lorentz force
Magnetic fields
Magnetometers
Polysilicon
Q factor measurement
Scattering parameters
Silicon alloys
Sensors
Audience
Scientific
Date
2012Metadata
Show full item recordDescription
This paper presents the design, fabrication and preliminary characterization of highly sensitive MEMS-based Xylophone Bar Magnetometers (XBMs) realized in imec's poly-SiGe MEMS technology. Key for our Lorentz force driven capacitively sensed resonant sensor are the combination of reasonably high Q-factor and conductivity of imec's poly-SiGe, our optimized multiphysics sensor design targeting the maximization of the Q-factor in a wide temperature range as well as our proprietary monolithic above-CMOS integration and packaging schemes. Prototypes 3-axis devices were fabricated and characterized. We present optical vibrometer and electrical S-parameter measurements of XBMs performed in vacuum with a reference magnet at increasing sensor separation. The optical oscillation amplitude is well correlated with the magnetic field amplitude. The electrical 2-port measurements, 1st port as Lorentz force actuator and 2nd port as capacitive sensor, also reproduces the designed magnetic field dependence. This opens the way towards the on-chip integration of small footprint extremely sensitive magnetometers.
Citation
Rochus, V.; Jansen, R.; Tilmans, H.A.C.; Rottenberg, X.; Chen, C.; Ranvier, S.; Lamy, H.; Rochus, P. (2012). Poly-SiGe-based MEMS xylophone bar magnetometer. , Proceedings of IEEE Sensors, 6411484, DOI: 10.1109/ICSENS.2012.6411484.Identifiers
scopus: 2-s2.0-84873965866
Type
Conference
Peer-Review
No
Language
eng