• Login
     
    View Item 
    •   ORFEO Home
    • Royal Belgian Institute for Space Aeronomy
    • BIRA-IASB publications
    • View Item
    •   ORFEO Home
    • Royal Belgian Institute for Space Aeronomy
    • BIRA-IASB publications
    • View Item
    JavaScript is disabled for your browser. Some features of this site may not work without it.

    Poly-SiGe-based MEMS xylophone bar magnetometer

    Thumbnail
    View/Open
    Rochus(2012b).pdf (671.0Kb)
    Authors
    Rochus, V.
    Jansen, R.
    Tilmans, H.A.C.
    Rottenberg, X.
    Chen, C.
    Ranvier, S.
    Lamy, H.
    Rochus, P.
    Show allShow less
    Discipline
    Physical sciences
    Subject
    High Q factor
    In-vacuum
    Integration and packaging
    Lorentz force actuators
    Magnetic field amplitudes
    Magnetic field dependences
    MEMS technology
    Multi-physics
    On-chip integration
    Optical oscillations
    Optical vibrometer
    Poly-SiGe
    Q-factors
    Resonant sensors
    S-Parameter measurements
    Sensor designs
    Small footprints
    Wide temperature ranges
    Lorentz force
    Magnetic fields
    Magnetometers
    Polysilicon
    Q factor measurement
    Scattering parameters
    Silicon alloys
    Sensors
    Audience
    Scientific
    Date
    2012
    Metadata
    Show full item record
    Description
    This paper presents the design, fabrication and preliminary characterization of highly sensitive MEMS-based Xylophone Bar Magnetometers (XBMs) realized in imec's poly-SiGe MEMS technology. Key for our Lorentz force driven capacitively sensed resonant sensor are the combination of reasonably high Q-factor and conductivity of imec's poly-SiGe, our optimized multiphysics sensor design targeting the maximization of the Q-factor in a wide temperature range as well as our proprietary monolithic above-CMOS integration and packaging schemes. Prototypes 3-axis devices were fabricated and characterized. We present optical vibrometer and electrical S-parameter measurements of XBMs performed in vacuum with a reference magnet at increasing sensor separation. The optical oscillation amplitude is well correlated with the magnetic field amplitude. The electrical 2-port measurements, 1st port as Lorentz force actuator and 2nd port as capacitive sensor, also reproduces the designed magnetic field dependence. This opens the way towards the on-chip integration of small footprint extremely sensitive magnetometers.
    Citation
    Rochus, V.; Jansen, R.; Tilmans, H.A.C.; Rottenberg, X.; Chen, C.; Ranvier, S.; Lamy, H.; Rochus, P. (2012). Poly-SiGe-based MEMS xylophone bar magnetometer. , Proceedings of IEEE Sensors, 6411484, DOI: 10.1109/ICSENS.2012.6411484.
    Identifiers
    uri: https://orfeo.belnet.be/handle/internal/3046
    doi: http://dx.doi.org/10.1109/ICSENS.2012.6411484
    scopus: 2-s2.0-84873965866
    Type
    Conference
    Peer-Review
    No
    Language
    eng
    Links
    NewsHelpdeskBELSPO OA Policy

    Browse

    All of ORFEOCommunities & CollectionsBy Issue DateAuthorsTitlesDisciplinesThis CollectionBy Issue DateAuthorsTitlesDisciplines
     

    DSpace software copyright © 2002-2016  DuraSpace
    Send Feedback | Cookie Information
    Theme by 
    Atmire NV