Influence of multiphysics couplings on the performance of a MEMS magnetometer
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Authors
Ranvier, S.
Paquay, S.
Requier, S.
Lamy, H.
Rochus, V.
Francis, L.A.
Rochus, P.
Discipline
Physical sciences
Subject
Fundamental frequencies
Material property
MEMS simulations
Multiphysics coupling
Physical phenomena
Pre-stress
Pre-stressed
Strong coupling
Temperature dependencies
Electric properties
Experiments
Magnetometers
Materials properties
Mechanical properties
Microelectronics
Microsystems
Stresses
Audience
Scientific
Date
2011Metadata
Show full item recordDescription
In this paper, several physical phenomena that are usually not taken into account in MEMS simulations are considered for the simulation of a MEMS xylophone bar magnetometer. These phenomena are the temperature dependency of the material properties, the strong coupling between various fields of physics (thermal, electric and mechanical) and the stress produced by the change of temperature inside the structure. It is shown that the temperature dependency of the material properties has a relatively small influence whereas the pre-stress has a significant one. Because of the pre-stressed state, the deformation of the bar at the fundamental frequency is not a typical first mode vibration but it exhibits additional waves between the linkages, where the bar is stressed, which significantly decrease the amplitude of the deflection.
Citation
Ranvier, S.; Paquay, S.; Requier, S.; Lamy, H.; Rochus, V.; Francis, L.A.; Rochus, P. (2011). Influence of multiphysics couplings on the performance of a MEMS magnetometer. , 2011 12th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 5765803, DOI: 10.1109/ESIME.2011.5765803.Identifiers
isbn: 9781457701078
scopus: 2-s2.0-79957898421
Type
Conference
Peer-Review
No
Language
eng