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    Influence of multiphysics couplings on the performance of a MEMS magnetometer

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    Ranvier(2011a).pdf (2.287Mb)
    Authors
    Ranvier, S.
    Paquay, S.
    Requier, S.
    Lamy, H.
    Rochus, V.
    Francis, L.A.
    Rochus, P.
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    Discipline
    Physical sciences
    Subject
    Fundamental frequencies
    Material property
    MEMS simulations
    Multiphysics coupling
    Physical phenomena
    Pre-stress
    Pre-stressed
    Strong coupling
    Temperature dependencies
    Electric properties
    Experiments
    Magnetometers
    Materials properties
    Mechanical properties
    Microelectronics
    Microsystems
    Stresses
    Audience
    Scientific
    Date
    2011
    Metadata
    Show full item record
    Description
    In this paper, several physical phenomena that are usually not taken into account in MEMS simulations are considered for the simulation of a MEMS xylophone bar magnetometer. These phenomena are the temperature dependency of the material properties, the strong coupling between various fields of physics (thermal, electric and mechanical) and the stress produced by the change of temperature inside the structure. It is shown that the temperature dependency of the material properties has a relatively small influence whereas the pre-stress has a significant one. Because of the pre-stressed state, the deformation of the bar at the fundamental frequency is not a typical first mode vibration but it exhibits additional waves between the linkages, where the bar is stressed, which significantly decrease the amplitude of the deflection.
    Citation
    Ranvier, S.; Paquay, S.; Requier, S.; Lamy, H.; Rochus, V.; Francis, L.A.; Rochus, P. (2011). Influence of multiphysics couplings on the performance of a MEMS magnetometer. , 2011 12th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 5765803, DOI: 10.1109/ESIME.2011.5765803.
    Identifiers
    isbn: 9781457701078
    uri: https://orfeo.belnet.be/handle/internal/3119
    doi: http://dx.doi.org/10.1109/ESIME.2011.5765803
    scopus: 2-s2.0-79957898421
    Type
    Conference
    Peer-Review
    No
    Language
    eng
    Links
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